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High vacuum diffusion pump unit

High vacuum oil diffusion pump vacuum unit

I. Product Overview 

The high vacuum oil diffusion pump vacuum unit uses the oil diffusion pump as the main pumping pump, and is equipped with a rotary vane vacuum pump or a Roots vacuum pump as the pre-pumping pump at the front stage. It achieves high vacuum pumping through the jet effect of the vacuum pump oil. The unit has no internal moving friction components, ensuring stable operation, low noise, and low maintenance costs. The ultimate vacuum level can reach below 2×10^{-4} Pa. With the addition of a cold trap, it can be increased to 5×10^{-5} Pa. The working pressure range is 10^{-2} Pa - 10^{-7} Pa. It is the core high vacuum equipment in fields such as semiconductor manufacturing, optical vacuum coating, vacuum sintering, space simulation, electronic component packaging, and scientific research experiments. 

The equipment is equipped with standard water-cooled baffles, vacuum valves, oil-gas collector, and intelligent control cabinet. It can effectively prevent the reflux of oil vapor, ensuring the cleanliness of the vacuum process. It also features functions such as water shortage protection, over-temperature alarm, and automatic protection in case of power failure. It can operate continuously and stably for 24 hours and is suitable for industrial mass production and laboratory precision vacuum requirements.


Product Details

　II. Core Basic Parameters

Parameter Name

Technical indicators

Note Explanation

Limit vacuum level

≤ 2×10^{-4} Pa (for regular model); ≤ 5×10^{-5} Pa (for cold trap model)

Using special high-vacuum silicone oil, the measured values under no backflow conditions

Vacuum extraction rate

80-16000L/s

Covering all scenarios including small laboratories, medium-sized industries, and large-scale mass production.

Work stress range

 10^{-2}Pa- 10^{-7}Pa

Optimal and efficient vacuum extraction range: 10^{-3} Pa - 10^{-4} Pa

Initial pump startup pressure

≤5 Pa (rotary vane pump); ≤1 Pa (rotary vane + rotary vane)

Only after the pre-pumping of the previous stage meets the standard can the heating of the diffusion pump be initiated.

Heating power of the diffusion pump

0.55-24kW

Variable temperature control is available. The high-power model also offers a variable frequency energy-saving mode.

Cooling method

The pump body of the diffusion pump is water-cooled with baffles, and the cold trap model can be optionally equipped with liquid nitrogen refrigeration.

The cooling water temperature is between 10 and 35 degrees Celsius, and the flow rate is no less than 200 liters per hour.

Operating noise

≤ 55 dB (small size); ≤ 70 dB (large size)

Standard equipped with shock-absorbing base, no vibration or abnormal noise

Work environment

Temperature: -10℃ to 55℃, Humidity: ≤ 90% RH (no condensation)

Adaptable to regular working conditions such as workshops and laboratories

Safety protection device

Water shortage alarm, over-temperature power-off, oil level monitoring, anti-backflow check valve

Prevent the pump body from overheating dryly and the return of oil vapor from damaging the process components.

　　

III. Core Structure Configuration 

1. Main pump (diffusion pump): Multi-stage nozzle (4-5 stages) design. The pump body is made of stainless steel/high-strength aluminum alloy, with special high-vacuum silicone oil. It has no moving parts and has a long service life. 

2. Pre-stage pump: Standardly equipped with 2XZ/2X series double-stage vane pumps. For high pumping speed models, the Rotocross + vane pump combination can be selected to complete the pre-pumping from atmospheric pressure to medium-low vacuum. 

3. Vacuum accessories: Water-cooled baffle/cold cap, High vacuum baffle valve, Vacuum pipeline, Oil-gas filter, Vacuum pressure gauge/Ionization vacuum gauge 

4. Control System: Independent electrical control cabinet, capable of achieving automatic start/stop, temperature regulation, fault alarm, and real-time monitoring of vacuum degree. 

5. Interface Specifications: Air intake port: DN100-DN1000 (ISO-K/KF quick-connect flanges), Cooling water interface: 1/2" - 2" standard threads of the Chinese standard. 

IV. Technical Parameter Table of Typical Models

Unit model

Vacuum extraction rate(L/s)

Absolute vacuum(Pa)

Heating power of the diffusion pump(kW)

Pump configuration at the preceding stage

Intake diameter(DN)

Overall weight of the machine(kg)

Operating noise(dB)

JK-100

80

≤ 2.7×10^{-4}

0.55

2XZ-4B

100

180

≤55

JK-200T

600

≤ 2.7×10^{-4}

1.8

2X-15

200

320

≤58

JK-300T

1400

≤ 2.7×10^{-4}

3.0

2X-30

300

480

≤60

JK-400T

2600

≤ 2.7×10^{-4}

5.0

2X-70

400

650

≤62

JK-500TD

3800

≤ 2.7×10^{-4}

6.9

2X-70

500

820

≤65

JK-600T

5600

≤ 2.7×10^{-4}

8.4

2X-70

600

980

≤65

JK-800

10000

≤ 2.7×10^{-4}

8.4

2X-70×2

800

1200

≤68

JK-800TD

12000

≤ 2.7×10^{-4}

15

2X-150×2

800

1350

≤68

JK-1000TD

13000

≤ 2.7×10^{-4}

24

2X-150×2

1000

1600

≤70

JK-1200

16000

≤ 2.7×10^{-4}

24

2X-150×2

1000

1850

≤70

V. Applicable Conditions and Customized Services 

(1) Applicable Scenarios 

6. Semiconductor Microelectronics: Wafer coating, chip packaging, lithography process vacuum system 

7. Vacuum Coating: Optical lens coating, hardware decoration coating, winding coating, metal evaporation coating 

8. Material processing: Vacuum sintering, vacuum annealing, vacuum brazing, rare metal melting 

9. Scientific research experiments: Space environment simulation, material vacuum degassing, mass spectrometer, spectral analysis equipment and accessories 

10. Industrial Production: Photovoltaic cell manufacturing, vacuum tube packaging, vacuum drying and purification 

(2) Customization Options 

11. Cleanliness upgrade: Installed liquid nitrogen cold trap to reduce the reflux of oil vapor, meeting the requirements of ultra-high cleanliness vacuum. 

12. Anti-corrosion customization: The pump body and piping are made of 304/316L stainless steel, suitable for applications with trace corrosive gases. 

13. Energy-saving renovation: Variable-frequency heating control system, reducing energy consumption by 20% - 30% 

14. Automation Upgrade: PLC intelligent control, remote monitoring, and integration with the factory's MES system 

15. Customization for non-standard products: Special口径， special suction speed, vertical/horizontal installation methods customization 

VI. Operating and Maintenance Precautions 

16. Startup sequence: First, turn on the cooling water → Start the pre-stage pump → Pre-suction to ≤ 5 Pa → Turn on the diffusion pump heating → After the vacuum level reaches the standard, open the high vacuum valve 

17. Operation Monitoring: Real-time monitoring of cooling water flow, pump body temperature, and vacuum level. It is strictly prohibited to operate without water or with excessive temperature. 

18. Maintenance cycle: Replace the silicone oil in the diffusion pump every 6 months, and inspect the heating elements, seals, and vacuum valves annually. 

19. Shutdown sequence: Shut off the heating of the diffusion pump → Continue the water cooling cycle for 30 minutes → Shut off the preceding pump → Shut off the cooling water → Seal the vacuum interface 

20. Winter protection: For long-term shutdowns, it is necessary to drain the cooling water in the pump body and the pipeline to prevent the equipment from freezing and cracking. 

VII. Common Fault Troubleshooting Checklist

Fault phenomenon

Cause of the malfunction

Solution

The vacuum level does not meet the standards.

1. The oil of the diffusion pump has deteriorated or there is insufficient oil; 2. There is air leakage in the pipelines or valves; 3. The water cooling baffles are clogged; 4. The primary pump is malfunctioning.

1. Replace the new silicone oil and refill it to the standard oil level; 2. Detect the leakage points and repair the seals; 3. Clean the oil stains on the baffles; 4. Inspect and repair the pre-stage pump.

Severe backflow of oil vapor

1. The water-cooling baffle is not filled with water or is not cooled adequately; 2. The heating temperature of the diffusion pump is too high; 3. A cold trap has not been installed.

1. Ensure the normal circulation of cooling water; 2. Reduce the heating power and control the oil temperature; 3. Install a liquid nitrogen cold trap

The diffusion pump takes a long time to heat up.

1. Heating element is damaged; 2. Poor circuit connection; 3. Insufficient voltage

1. Replace the heating tube; 2. Repair the circuit connectors; 3. Stabilize the power supply voltage

Abnormal noise during the operation of the unit

1. The rotor of the preceding pump is stuck or lacks lubrication; 2. The shock absorption base is loose; 3. The pipeline is resonating.

1. Inspect and repair the pre-stage pump, and replenish the pump oil; 2. Tighten the shock absorption bolts; 3. Adjust the pipeline fixation.

　　Service hotline: 0533-8225566  1506431898

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